Vacuum Assembly System
- Assembly with Vacuum diferences.
- High Vacuum,High Accuracy Alignment
Feature
| Applicable substrate size | 200x200mm～730x920mm |
|---|---|
| Vacuum: applicable to | ~1Pa |
| Positioning accuracy | +/-1μm |
| Substrate fixation | Electrostatic chuck, Adhesive chuck |
| Main uses | OLED, CMOS sensor, Touch panel, Solar cell, MEMS |
OLED Encapsulation - Total Integration of Production Line
Since 1998,WE supply many kinds fo the tools for OLED
Encapsulation process.
We integrate with other suppliers and promise the total
solution.
specification
| Applicable substrate size | 200x200mm～730x920mm |
|---|---|
| Dispenser | Dam, Dam & Fill |
| Oven | ~250℃ |
| Cleaning | Ultrasonic Clean, ATM Plasma Clean |
| Glove Box | N2 gas circulation, O2/H2O below 1ppm |
